• 文献标题:   A Study on the Laser Direct Etching of Indium-Tin-Oxide-Graphene Multilayer on Glass Substrate
  • 文献类型:   Article
  • 作  者:   HEO J, HAN JH, KWON SJ, CHO ES
  • 作者关键词:   transparent conductive electrode tce, itographene, nd:yvo4 laser, raman spectroscopy, selective etching, thermal conductivity
  • 出版物名称:   SCIENCE OF ADVANCED MATERIALS
  • ISSN:   1947-2935 EI 1947-2943
  • 通讯作者地址:   Gachon Univ
  • 被引频次:   1
  • DOI:   10.1166/sam.2018.2984
  • 出版年:   2018

▎ 摘  要

An indium-tin-oxide ( ITO)-graphene multilayer was directly patterned using a 1064 nm Q-switched neodymiumdoped yttrium vanadate (Nd:YVO4) laser in a new attempt to improve the fragility and weak adhesion of graphene as well as the conductivity of transparent conductive electrodes ( TCEs) without any degradation in transmittance. The ITO-graphene multilayer exhibited narrower etching patterns than a graphene monolayer due to the higher thermal conductivity of the ITO layer than that of a glass substrate. Raman mapping and spectroscopy of the laser patterns showed selective etching of the graphene onto the ITO at a lower overlap of the laser beams and the incomplete removal of graphite ingredients at a lower laser pulse energy. The ITO-graphene electrode was fabricated via laser patterning with an optimized laser beam condition, and it was possible to determine that it had a higher conductivity than an ITO electrode.