• 文献标题:   Direct growth of globally aligned graphene nanoribbons on reconstructed sapphire substrate using PECVD
  • 文献类型:   Article
  • 作  者:   ZOU MZ, LIU WM, YU Y, WANG SS, XU B, QIAN L, TONG TZ, ZHANG J
  • 作者关键词:   graphene nanoribbon gnr, global alignment, sapphire, insulating substrate, plasma enhanced chemical vapor deposition pecvd
  • 出版物名称:   NANO RESEARCH
  • ISSN:   1998-0124 EI 1998-0000
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1007/s12274-022-4797-1 EA SEP 2022
  • 出版年:   2023

▎ 摘  要

Graphene nanoribbons (GNRs) are regarded as an ideal candidate for beyond-silicon electronics. However, synthesis of aligned GNR arrays on insulating substrates with high efficiency is challenging. In this work, we develop a facile strategy, involving KOH pre-treatment and high-temperature annealing, to construct parallel steps on the two-fold symmetry a-plane sapphire substrate. Horizontal GNRs as narrow as 15.1 nm with global alignment across a region of 20 mm(2) are then grown on the step edgeenriched substrate through plasma enhanced chemical vapor deposition (PECVD) method. GNRs align well along the atomic steps on sapphire ([1 (1) over bar 00] direction) with their widths and densities swiftly adjustable by step morphology modification on substrate surface. A step-edge confined growth mechanism is proposed, attributing the constraint on the nanoribbon broadening to a relatively low growth temperature in PECVD, which restrains the activation energy to suppress GNRs across step edges on sapphire and prevents detrimental nanoribbon widening. The results provide a new perspective for scalable synthesizing well aligned nanoribbons of other two-dimensional materials.