• 文献标题:   Synthesis of graphene on a polycrystalline Co film by radio-frequency plasma-enhanced chemical vapour deposition
  • 文献类型:   Article
  • 作  者:   WANG SM, PEI YH, WANG X, WANG H, MENG QN, TIAN HW, ZHENG XL, ZHENG WT, LIU YC
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF PHYSICS DAPPLIED PHYSICS
  • ISSN:   0022-3727 EI 1361-6463
  • 通讯作者地址:   Jilin Univ
  • 被引频次:   50
  • DOI:   10.1088/0022-3727/43/45/455402
  • 出版年:   2010

▎ 摘  要

Graphene of 1-5 layers was synthesized on a polycrystalline Co film by radio-frequency plasma-enhanced chemical vapour deposition at a relatively low temperature of 800 degrees C for only 40 s in a mixture of gases of CH4/H-2/Ar (1/5/20, with a total gas flow rate of 78 sccm). The obtained graphene is of high quality as revealed by Raman spectroscopy and x-ray photoelectron spectroscopy. It exhibits a high optical transmittance of more than 70% in the wavelength range 500-1200 nm, and a sheet resistivity of 2661 Omega/sq. A possible formation mechanism is proposed. The significant influence of octahedral and tetrahedral lattice interstitial sites in the Co crystallites on the formation of graphene is discussed.