• 文献标题:   Low frequency graphene resonators for acoustic sensing
  • 文献类型:   Article
  • 作  者:   GRADY E, MASTROPAOLO E, CHEN T, BUNTING A, CHEUNG R
  • 作者关键词:   graphene, raman, young s modulu, resonant frequency, acoustic sensing, mems
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1521-3757
  • 通讯作者地址:   Univ Edinburgh
  • 被引频次:   9
  • DOI:   10.1016/j.mee.2014.02.036
  • 出版年:   2014

▎ 摘  要

Graphene resonators have been fabricated in rectangular and circular geometries ranging from 1 to 3 mm in diameter. The resonant frequencies have been measured, and fitted to an analytical model. An optical profile of the graphene sheet has been taken, and the monolayer graphene has been confirmed to be of high quality using Raman spectroscopy. The graphene membranes have shown hookean behaviour with no evidence of deformation. The characterisation of the single layer graphene sheet on this large scale provides new information previously unavailable on the mechanical stability of graphene with ultra high aspect ratio. (C) 2014 Elsevier B.V. All rights reserved.