• 文献标题:   Graphene and Thin-Film Semiconductor Heterojunction Transistors Integrated on Wafer Scale for Low-Power Electronics
  • 文献类型:   Article
  • 作  者:   HEO J, BYUN KE, LEE J, CHUNG HJ, JEON S, PARK S, HWANG S
  • 作者关键词:   graphene, thinfilm semiconductor, heterojunction transistor, waferscale integration, lowpower electronic
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Samsung Elect Co
  • 被引频次:   44
  • DOI:   10.1021/nl403142v
  • 出版年:   2013

▎ 摘  要

Graphene heterostructures in which graphene is combined with semiconductors or other layered 2D materials are of considerable interest, as a new class of electronic devices has been realized. Here we propose a technology platform based on graphene thin-film-semiconductor metal (GSM) junctions, which can be applied to large-scale and power-efficient electronics compatible with a variety of substrates. We demonstrate wafer-scale integration of vertical field-effect transistors (VFETs) based on graphene In-Ga-Zn-O (IGZO)-metal asymmetric junctions on a transparent 150 x 150 mm(2) glass. In this system, a triangular energy barrier between the graphene and metal is designed by selecting a metal with a proper work function. We obtain a maximum current on/off ratio (I-on/I-off) up to 106 with an average of 3010 over 2000 devices under ambient conditions. For low-power logic applications, an inverter that combines complementary n-type (IGZO) and p-type (Ge) devices is demonstrated to operate at a bias of only 0.5 V.