▎ 摘　　要

Tunable metasurfaces enable us to dynamically control light at subwavelength scales. Here, using phase change materials and transparent graphene heaters, a new structure is proposed to develop tunable metasurfaces which support first-order Mie-type resonance in the near-IR regime. In the proposed structure, by adjusting the bias voltages applied to transparent graphene heaters, the crystallization levels of the phase change materials are controlled, which in turn modifies the response of the metasurface. The proposed metasurface is able to modulate the phase of the reflected wave in the range of 0 degrees to -270 degrees at the telecommunication wavelength of lambda= 1.55 mu m. A comprehensive Joule heating analysis is performed to investigate the thermal characterizations of the proposed structure. The results of this analysis show that there is a suitable thermal isolation between adjacent unit cells, making individual control on unit cells possible. The potential ability of the proposed metasurface as a beam steering device is also demonstrated. By using the proposed unit cells, a beam-steering device is designed and numerically studied. This study shows that the device can reflect a light normally incident on it in the range of +/- 65 degrees with reasonably low sidelobe levels. The proposed structure can be used in developing low-cost integrated LiDARs. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement