▎ 摘　　要

Two-dimensional nano-graphene sheets, standing vertically on carbon nanowalls (CNWs) substrates, were synthesized by multi-beam chemical vapor deposition employing three types of irradiation, Ar+ beam with tunable fluxes and energies, hydrogen ( H) and fluorocarbon radicals, which could be independently controlled. The CNWs growth processes were investigated by changing the Ar+ irradiation conditions. Irradiation of Ar+ ions with appropriate fluxes and energies on fluorocarbon layers evolved nanoislands for growth of the CNWs. By tuning the fluxes and energies of the incident Ar+ on amorphous carbon nanoislands, critical factors for controlling nucleation and growth of CNWs were determined. (C) 2010 The Japan Society of Applied Physics