▎ 摘　　要

In this paper, micro temperature sensor with micro ring resonator and graphene material has been investigated. The main idea is to control the temperature of system by the layer of graphene on micro ring resonator path. By rising the temperature of the system, graphene with 5000 W/mK thermal conductivity senses this increase and applies it in sensor resonance peaks. The linear temperature difference causes a linear difference in sensitivity, power, and energy level, which shows the correct functioning of the system. Electronic sensors suffer from electrical disturbances and electromagnetic interference and sometimes do not function properly, therefore this micrometer optical sensor with 44 x 40 mu m dimensions is necessary in industrial and medical fields because it has small dimension, high finesse and sensitivity, low weight and cost in comparison with other sensors. Other materials of this sensor are Si and Si02 which are natural elements and have a high melting point. The FSR and FWHM of system are 660 GHZ and 30 GHZ which are acceptable values in comparison with other optical sensors. The time rotation and time delay unit reaching to 0.31 ps and 1.51 ps in accordance which have an acceptable time and also total length of ring is 94 mu m.