• 文献标题:   Controllable graphene N-doping with ammonia plasma
  • 文献类型:   Article
  • 作  者:   LIN YC, LIN CY, CHIU PW
  • 作者关键词:   annealing, charge exchange, doping profile, graphene, narrow band gap semiconductor, nitrogen, plasma materials processing, semiconductor doping
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Natl Tsing Hua Univ
  • 被引频次:   374
  • DOI:   10.1063/1.3368697
  • 出版年:   2010

▎ 摘  要

Here we show that gas-phase doping by means of NH3 plasma exposure is a highly flexible and manufacturable process for graphene electronics. The nitrogen-containing radicals can readily form covalent bonds with the carbon lattice and keep stable in the postannealing for damage restoration. The amount of charge transfer can be fine tuned by controlling the exposure time and monitored by the systematic shift in the Raman G mode and the G(ds)-V-g curves in transport measurements. The maximum doping level can reach 1.5x10(13) cm(-2).