• 文献标题:   Morphology characterization of argon-mediated epitaxial graphene on C-face SiC
  • 文献类型:   Article
  • 作  者:   TEDESCO JL, JERNIGAN GG, CULBERTSON JC, HITE JK, YANG Y, DANIELS KM, MYERSWARD RL, EDDY CR, ROBINSON JA, TRUMBULL KA, WETHERINGTON MT, CAMPBELL PM, GASKILL DK
  • 作者关键词:   chemical vapour deposition, epitaxial layer, graphene, island structure, nucleation
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   USN
  • 被引频次:   57
  • DOI:   10.1063/1.3442903
  • 出版年:   2010

▎ 摘  要

Epitaxial graphene layers were grown on the C-face of 4H-SiC and 6H-SiC using an argon-mediated growth process. Variations in growth temperature and pressure were found to dramatically affect the morphological properties of the layers. The presence of argon during growth slowed the rate of graphene formation on the C-face and led to the observation of islanding. The similarity in the morphology of the islands and continuous films indicated that island nucleation and coalescence is the growth mechanism for C-face graphene. (C) 2010 American Institute of Physics. [doi:10.1063/1.3442903]