• 文献标题:   Conductance Tunable Suspended Graphene Nanomesh by Helium Ion Beam Milling
  • 文献类型:   Article
  • 作  者:   LIU FY, WANG ZW, NAKANAO S, OGAWA S, MORITA Y, SCHMIDT M, HAQUE M, MURUGANATHAN M, MIZUTA H
  • 作者关键词:   graphene nanomesh, helium ion microscope, thermal activation energy
  • 出版物名称:   MICROMACHINES
  • ISSN:  
  • 通讯作者地址:   Japan Adv Inst Sci Technol
  • 被引频次:   1
  • DOI:   10.3390/mi11040387
  • 出版年:   2020

▎ 摘  要

This paper demonstrates that the electrical properties of suspended graphene nanomesh (GNM) can be tuned by systematically changing the porosity with helium ion beam milling (HIBM). The porosity of the GNM is well-controlled by defining the pitch of the periodic nanopores. The defective region surrounding the individual nanopores after HIBM, which limits the minimum pitch achievable between nanopores for a certain dose, is investigated and reported. The exponential relationship between the thermal activation energy (E-A) and the porosity is found in the GNM devices. Good E-A tuneability observed from the GNMs provides a new approach to the transport gap engineering beyond the conventional nanoribbon method.