• 文献标题:   High-contrastoptical microscopy of graphene sheets
  • 文献类型:   Article
  • 作  者:   VAZIRI MRR
  • 作者关键词:   graphene, highcontrast, optical imaging, optical microscopy, sizedependent propertie
  • 出版物名称:   MICROSCOPY RESEARCH TECHNIQUE
  • ISSN:   1059-910X EI 1097-0029
  • 通讯作者地址:   Nucl Sci Technol Res Inst
  • 被引频次:   0
  • DOI:   10.1002/jemt.23505 EA JUL 2020
  • 出版年:   2020

▎ 摘  要

In the way of making graphene an industry-friendly material, it must be mass-produced with high-quality and reduced cost over large areas. Assisted by machine-learning techniques, rapid, nondestructive and accurate determination of large graphene sheets on SiO2/Si substrates has been made possible in recent years by the optical microscopy method. Optimization of the substrate to achieve the maximum contrast can further extend the application of the optical microscopy method for quality control of the mass-produced graphene. Graphene/n(2)/n(3)three-layer structures, wheren(2)andn(3)are refractive indices, are routinely used for identifying the number of graphene layers by optical reflection microscopy. In this paper, two analytical equations are derived that can be easily used for high-contrast optical imaging of graphene sheets without any need to resort to the cumbersome numerical methods. One of the equations is derived for choosing the best material with refractive indexn(2)that when coated on a substrate with refractive indexn(3), maximizes the optical contrast. The other equation is derived for finding the best thickness of the SiO(2)layer in graphene/SiO2/Si structures, which are in common use for fabrication of graphene-based devices. The results are implemented in a MATLAB GUI, see Supporting Information, to assist the users in using the equations.