• 文献标题:   High throughput transfer technique: Save your graphene
  • 文献类型:   Article
  • 作  者:   KIREEV D, SARIK D, WU T, XIE X, WOLFRUM B, OFFENHAUSSER A
  • 作者关键词:  
  • 出版物名称:   CARBON
  • ISSN:   0008-6223 EI 1873-3891
  • 通讯作者地址:   Forschungszentrum Julich
  • 被引频次:   13
  • DOI:   10.1016/j.carbon.2016.05.058
  • 出版年:   2016

▎ 摘  要

The development rate of graphene-related research is tremendous. New methods of graphene growth and transfer are reported on a regular basis, trending towards large-scale. Nevertheless, the fabrication of high-yield and low-cost graphene devices is still challenging. In this work, we approach this problem from a technological point of view and propose a new, so-called "high-throughput transfer technique". The technique allows a semi-automatic transfer of graphene films right at the desired places on a wafer. We demonstrate the applicability of our method by aligning 52 graphene devices on a 4-inch wafer using only 4 cm(2) of graphene. The overall yield of this process is over 90%. (C) 2016 Elsevier Ltd. All rights reserved.