• 文献标题:   Contactless graphene conductance measurements: the effect of device fabrication on terahertz time-domain spectroscopy
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   MACKENZIE DMA, BURON JD, BOGGILD P, JEPSEN PU, PETERSEN DH
  • 作者关键词:   cvd graphene, terahertz timedomain spectroscopy, laser ablation, tray
  • 出版物名称:   INTERNATIONAL JOURNAL OF NANOTECHNOLOGY
  • ISSN:   1475-7435 EI 1741-8151
  • 通讯作者地址:   Tech Univ Denmark
  • 被引频次:   9
  • DOI:   10.1504/IJNT.2016.079660
  • 出版年:   2016

▎ 摘  要

We perform contactless full-wafer maps of the electrical conductance of a 4-inch wafer of single-layer CVD graphene using terahertz time-domain spectroscopy both before and after deposition of metal contacts and fabrication of devices via laser ablation. We find that there is no significant change in the measured conductance of graphene before and after device fabrication. We also show that precise terahertz time-domain spectroscopy can be performed when the beam spot is at sufficient distance (>1.2 mm) from metal contacts.