▎ 摘　　要

A carbon-based inductor may serve as an important passive component in a carbon-based radio-frequency (RF) integrated circuit (IC). In this work, chemical vapor deposition (CVD) synthesized monolayer graphene and graphite inductors are fabricated and their Q-factors are investigated. We find that the large series resistance of signal path (including coil resistance and contact resistance) in monolayer graphene inductors causes negative Q-factors at the whole frequency range in measurement. Comparatively, some of the graphite inductors have all of their Q-factors above zero, due to their small signal path resistance. We also note that some other graphite inductors have negative Q-factor values at low frequency regions, but positive Q-factor values at high frequency regions. With an equivalent circuit model, we confirm that the negative Q-factors of some graphite inductors at low frequency regions are related to their relatively large contact resistances, and we are able to eliminate these negative Q-factors by improving the graphite-metal contact. Furthermore, the peak Q-factor (Q(p)) can be enhanced by lowering down the resistance of graphite coil. For an optimized 3/4-turn graphite inductor, the measured maximum Q-factor (Q(m)) can reach 2.36 and the peak Q-factor is theoretically predicted by the equivalent circuit to be as high as 6.46 at a high resonant frequency, which is beyond the testing frequency range. This research indicates that CVD synthesized graphite thin film is more suitable than graphene for fabricating inductors in carbon-based RF IC in the future.