• 文献标题:   Direct growth of few-layer graphene on 6H-SiC and 3C-SiC/Si via propane chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   MICHON A, VEZIAN S, OUERGHI A, ZIELINSKI M, CHASSAGNE T, PORTAIL M
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   CNRS CRHEA
  • 被引频次:   53
  • DOI:   10.1063/1.3503972
  • 出版年:   2010

▎ 摘  要

We propose to grow graphene on SiC by a direct carbon feeding through propane flow in a chemical vapor deposition reactor. X-ray photoemission and low energy electron diffraction show that propane allows to grow few-layer graphene (FLG) on 6H-SiC(0001). Surprisingly, FLG grown on (0001) face presents a rotational disorder similar to that observed for FLG obtained by annealing on (000-1) face. Thanks to a reduced growth temperature with respect to the classical SiC annealing method, we have also grown FLG/3C-SiC/Si(111) in a single growth sequence. This opens the way for large-scale production of graphene-based devices on silicon substrate. (C) 2010 American Institute of Physics. [doi:10.1063/1.3503972]