▎ 摘　　要

The authors present a viable process to grow the high quality graphene films with control over number of layers by the filtered cathodic vacuum arc (FCVA) technique. In the FCVA process, the different carbon concentrations can be controlled by precisely tuning the arc time (1-4 s). The arc generated carbon was deposited on the nickel catalyst at 800 degrees C, annealed for 10 min, and cooled down to room temperature in the presence of hydrogen gas, resulting in the graphene films with control over number of layers. Prior to arcing, hydrogen etching of nickel was carried out to clean the surface of the substrate. A growth model to prepare the high quality graphene has also been proposed. The as-grown graphene films were transferred to different substrates and are characterized by Raman spectroscopy, optical microscopy, high resolution transmission electron microscopy, and atomic force microscopy to determine the number of layers present in these films. Raman spectra of the prepared graphene films exhibit change in the G peak position from 1582.4 to 1578.1 cm(-1), two-dimensional (2D) peak shifts from 2688.5 to 2703.8 cm(-1), the value of I-2D/I-G increased from 0.38 to 3.82, and the full width at half maxima of 2D peak changed from 41 to 70 cm(-1), for different layers of graphene films. The high resolution transmission electron microscopy image revealed that the graphene films prepared for 1 and 2 s arc times have single and bi-or trilayered structures, respectively. (C) 2015 American Vacuum Society.