▎ 摘　　要

This paper describes the mechanical and electrical characteristics of a polydimethylsiloxane ( PDMS) cantilever integrated with a high-sensitivity strain sensor. The strain sensor is fabricated using PDMS and graphene flakes that are uniformly distributed in the PDMS. In order to prepare PDMS/graphene composite with uniform resistance, a tetrahydrofuran solution is used to decrease the viscosity of a PDMS base polymer solution. A horn-type sonicator is then used to mix the base polymer with graphene flakes. Low viscosity of the base polymer solution improves the reliability and reproducibility of the PDMS/graphene composite for strain sensor applications. After dicing the composite into the desired sensor shape, a tensile test is performed. The experimental results show that the composite with a concentration of 30 wt.% exhibits a linear response up to a strain rate of 9%. The graphene concentration of the prepared materials affects the gauge factor, which at 20% graphene concentration reaches about 50, and with increasing graphene concentration to 30% decreases to 9. Furthermore, photolithography, PDMS casting, and a stencil process are used to fabricate a PDMS cantilever with an integrated strain sensor. The change in resistance of the integrated PDMS/graphene sensor is characterized with respect to the displacement of the cantilever of within 500 mu m. The experimental results confirmed that the prepared PDMS/graphene based sensor has the potential for high-sensitive biosensor applications. Published by AIP Publishing.