• 文献标题:   Study of Graphene-based 2D-Heterostructure Device Fabricated by All-Dry Transfer Process
  • 文献类型:   Article
  • 作  者:   TIEN DH, PARK JY, KIM KB, LEE N, CHOI T, KIM P, TANIGUCHI T, WATANABE K, SEO Y
  • 作者关键词:   graphene, sandwich structure, mobility, graphene transfer, 2d material
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244
  • 通讯作者地址:   Sejong Univ
  • 被引频次:   20
  • DOI:   10.1021/acsami.5b10370
  • 出版年:   2016

▎ 摘  要

We developed a technique for transferring graphene and hexagonal boron nitride (hBN) in dry conditions for fabrication of van der Waals heterostructures. The graphene layer was encapsulated between two hBN layers so that it was kept intact during fabrication of the device. For comparison, we also. fabricated the devices containing graphene on SiO2/Si wafer and graphene on hBN. Electrical properties of the devices were investigated at room temperature. The mobility of the graphene on SiO2 devices and graphene on hBN devices were 15 000 and 37 000 cm(2) V-1 s(-1), respectively, while the mobility of the sandwich structure device reached the highest value of similar to 1.00 000 cm(2) V-1 s(-1), at room temperature. The electrical measurements of the samples were carried out in air and vacuum environments. We found that the electrical properties of the encapsulated graphene devices remained at a similar level both in a vacuum and in air, whereas the properties of the graphene without encapsulation were influenced by the external environment.