• 文献标题:   Flexible strain sensors based on electrostatically actuated graphene flakes
  • 文献类型:   Article
  • 作  者:   FARDINDOOST S, ALIPOUR A, MOHAMMADI S, GOKYAR S, SARVARI R, ZAD AI, DEMIR HV
  • 作者关键词:   graphene electromechanical resonator, strain sensing, flexible sensor
  • 出版物名称:   JOURNAL OF MICROMECHANICS MICROENGINEERING
  • ISSN:   0960-1317 EI 1361-6439
  • 通讯作者地址:   Sharif Univ Technol
  • 被引频次:   4
  • DOI:   10.1088/0960-1317/25/7/075016
  • 出版年:   2015

▎ 摘  要

In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 mu m, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of similar to 60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations.