▎ 摘　　要

Symmetric surface acoustic wave (SAW) atomizer was used to deposit graphene oxide (GO) nanofilms from microdroplets of the aqueous GO dispersion onto the surface of the SAW humidity sensors. The sensors with the deposited GO films were tested in a wide range of relative humidity and showed the amplitude of the response in the range of 1-40 kHz sufficient for the majority of applications. The kinetics of the adsorption of water molecules was modeled using the assumption that two independent first order adsorption processes take place. Saturation amplitudes and rate coefficients for both processes were experimentally evaluated using LSQ fitting of the sensor response in the time domain for the films obtained by different number of depositions. The mechanism of the adsorption of water molecules to the GO flakes is proposed and discussed. (C) 2014 The Authors. Published by Elsevier B.V.