• 文献标题:   Fabrication of free-standing Al2O3 nanosheets for high mobility flexible graphene field effect transistors
  • 文献类型:   Article
  • 作  者:   JUNG MW, SONG W, CHOI WJ, JUNG DS, CHUNG YJ, MYUNG S, LEE SS, LIM J, PARK CY, LEE JO, AN KS
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF MATERIALS CHEMISTRY C
  • ISSN:   2050-7526 EI 2050-7534
  • 通讯作者地址:   Korea Res Inst Chem Technol
  • 被引频次:   3
  • DOI:   10.1039/c4tc00041b
  • 出版年:   2014

▎ 摘  要

We propose a facile methodology for large-scale fabrication of graphene-based field effect transistors (GFETs) with two types of devices, top- and bottom-gated configurations. The top-gated GFETs containing a monolayer graphene channel, a free-standing Al2O3 nanosheet as the gate dielectrics and a top-gate electrode were assembled by a poly(methyl methacrylate)-assisted wet-transfer technique. As a result, the hole mobility of the top-gated GFETs was 2306.28 +/- 295.53 cm(2) V-1 s(-1), which is much higher than that of top-gated GFETs with Al2O3 dielectrics prepared by atomic layer deposition (15.28 cm(2) V-1 s(-1)). We also simultaneously synthesized graphene-graphite integrated electronic devices, in which we utilized graphene and graphite layers as an active channel layer and source/drain electrodes for bottom-gated all-graphene-based FETs, respectively. In addition, a layer-by-layer stacked multilayer graphene sheet and free-standing Al2O3 dielectrics were employed as a gate electrode and a dielectric layer, respectively. Significantly, all component layers were assembled by a poly(methyl methacrylate)-assisted wet-transfer technique, which is a progression towards high-performance, transparent, and flexible GFETs.