▎ 摘 要
The characteristics of Love wave biosensors are systematically investigated. The results show that sensors with combination of a ZnO guiding layer and 90ST or 90AT Quartz substrates exhibit purer Love modes than those with the SiO2 guiding layer. The corresponding maxi-mum sensitivities are -10.9069 and -11.641 m2/kg, respectively, which are nearly two times higher than those of SiO2 layer. The ZnO/90ST Quartz Love wave sensor exhibits the largest K2 of 0.3022 and achieves 0 ppm/degrees C of TCF at hZnO/lambda = 0.0216. The sensor employing the graphene IDT further improves the sensitivity by nearly one order of magnitude.