• 文献标题:   Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures
  • 文献类型:   Article
  • 作  者:   GOLER S, PIAZZA V, RODDARO S, PELLEGRINI V, BELTRAM F, PINGUE P
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF APPLIED PHYSICS
  • ISSN:   0021-8979
  • 通讯作者地址:   CNR
  • 被引频次:   19
  • DOI:   10.1063/1.3633260
  • 出版年:   2011

▎ 摘  要

We report on suspended single-layer graphene deposition by a transfer-printing approach based on polydimethylsiloxane stamps. The transfer printing method allows the exfoliation of graphite flakes from a bulk graphite sample and their residue-free deposition on a silicon dioxide substrate. This deposition system creates a "blistered" graphene surface due to strain induced by the transfer process itself. Single-layer-graphene deposition and its blistering on the substrate are demonstrated by a combination of Raman spectroscopy, scanning electron microscopy, and atomic-force microscopy measurements. Finally, we demonstrate that blister-like suspended graphene are self-supporting single-layer structures and can be flattened by employing a spatially resolved direct-lithography technique based on electron-beam induced etching. (C) 2011 American Institute of Physics. [doi:10.1063/1.3633260]