• 文献标题:   Graphene bandgap induced by ferroelectric HfO2 doped with Zr (HfZrO)
  • 文献类型:   Article
  • 作  者:   DRAGOMAN M, DINESCU A, NASTASE F, MOLDOVAN A, DRAGOMAN D
  • 作者关键词:   graphene, bandgap opening, hfzro, ferroelectric, fet
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Natl Inst Res Dev Microtechnol IMT
  • 被引频次:   1
  • DOI:   10.1088/1361-6528/ab814b
  • 出版年:   2020

▎ 摘  要

Motivated by the need to open a bandgap in graphene, we show experimentally that the CMOS-compatible ferroelectric HfZrO substrate induces a bandgap of 0.18 eV in graphene monolayer, which allows top-gate graphene/HfZrO/SiO2/Si field-effect transistors to have high on/off current ratio, of about 10(3), at small drain voltages, of 0.5 V, and for gate voltage spans of only 3.5 V. In addition, these transistors have a very high transconductance, of about 1 mS, and carrier mobilities of 7900 cm(2) Vs(-1). The results show that this relatively simple and wafer-scale compatible bandgap opening method in graphene renders this material useful for digital low-power electronics.