• 文献标题:   Electrical Control of Chemical Vapor Deposition of Graphene
  • 文献类型:   Article
  • 作  者:   WANG JT, PARK JH, LU AY, KONG J
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
  • ISSN:   0002-7863 EI 1520-5126
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1021/jacs.2c08001 EA DEC 2022
  • 出版年:   2022

▎ 摘  要

Chemical vapor deposition (CVD) is widely used for the efficient growth of low-dimensional materials. The growth mechanism comprises mass and heat transport, gas-phase and surface chemical reactions, and the interaction between the product and the substrate/catalyst. Correspondingly, the control-lable parameter space is conventionally focused on the mass flow of each component, the temperature of the reaction chamber and the substrate, and the material and structure of the substrate/catalyst. Here, we report that applying an electric field between the copper substrate and a counter electrode has significant impacts on the growth of graphene. Electrochemical effect and ionic collision effect are observed in different conditions. With the assistance of negative and positive voltages applied on the growth substrate, selective growth and rapid growth of clean graphene films are achieved, respectively. We anticipate such electrical control will open up new ways to assist the synthesis of two-dimensional (2D) materials.