• 文献标题:   Patterning of graphene microscale structures using electrohydrodynamic atomisation deposition of photoresist moulds
  • 文献类型:   Article
  • 作  者:   WANG DZ, MA Q, LIANG JS, XUE FH, CHEN L, WANG XD, ZHOU XF, LIU ZP
  • 作者关键词:   electrical resistivity, electrohydrodynamic, photolithography, photoresist, suspension, thin film, graphene, graphene microscale structure patterning, electrohydrodynamic deposition, photoresist mould, graphene suspension, graphene thin film, atomisationsubstrate distance, sheet resistance, deposition distance, sharpangled heave surface behaviour, electrohydrodynamic atomisation, photolithography polymeric micromoulding technique, graphene structure, photoresist micromould, c
  • 出版物名称:   MICRO NANO LETTERS
  • ISSN:  
  • 通讯作者地址:   Dalian Univ Technol
  • 被引频次:   2
  • DOI:   10.1049/mnl.2013.0678
  • 出版年:   2014

▎ 摘  要

In this reported work, a graphene suspension was atomised and deposited using the electrohydrodynamic atomisation technique, enabling the formation of a wide range of graphene thin films. The influences of the atomisation-substrate distance on the characteristics of the graphene films and their sheet resistances were analysed. A distance of 3 mm was found to be the optimum deposition distance for this graphene suspension to produce an even film and a low sheet resistance. At a lower and a higher working distance the graphene films exhibited a sharp-angled heave surface behaviour and a high sheet resistance. In addition, electrohydrodynamic atomisation combined with a photolithography polymeric micromoulding technique was used to form graphene structures. After removing the photoresist micromould, the graphene structures remained under well-arranged characteristics. After two layers of electrohydrodynamic atomisation deposition at a working distance of 3 mm, the thickness of the film was approximate to 400 nm and exhibited a sheet resistance of 127.5 sq(-1) (ohms per square).