▎ 摘　　要

In this study, main effects analysis of graphene grown by chemical vapor deposition methodology was performed using orthogonal arrays. For this purpose, the main responses were selected as the ID/IG value representing graphene defectiveness and I2D/IG value representing graphene thickness in the synthesis of graphene by Chemical Vapor Deposition methodology using ethanol and acetylene. The most effective parameters on ID/IG (antagonistically) and I2D/IG (synergistically) values were determined as reactor pressure and cooling rate for graphene synthesis with the use of ethanol. The most effective factors on the values of ID/IG (synergistically) and I2D/IG (antagonistically) were determined as the annealing time, the growth process acetylene flow rate, and the growth process hydrogen flow rate in the decomposition of acetylene. Optimum operating parameters were found as 400 mTorr for reactor pressure, 10 minutes for growth time, and low cooling rate (without fan) in the synthesis of graphene by chemical vapor deposition process using ethanol; 1000 degrees C for the annealing temperature, 10 minutes for the annealing time, 1 sccm for the growth process acetylene flow rate and 6 sccm for the growth process hydrogen flow rate in the synthesis of graphene by chemical vapor deposition using acetylene, respectively. When the values of ID/IG and I2D/IG were analyzed, it has been concluded that the synthesized graphene samples using ethanol, are produced with lower variance, allow us for better quality of graphene production.