▎ 摘　　要

Significant enhancement in supercapacitor performance was achieved via the synthesis of nanocrystalline RuO2 on vertically aligned Few Layered Graphene (FLG) nanoflakes, synthesized on bare n-type heavily doped silicon substrates by microwave plasma chemical vapour deposition. The RuO2 nanoparticles (diameter <2 nm) were deposited using a combination of low base pressure radio frequency magnetron sputtering and subsequent electrochemical cycling in acidic media. The well-dispersed RuO2 nanoparticles on FLGs achieve a specific capacitance of the order of 650 F g(-1). The specific capacitance of RuO2-FLGs is significantly higher than pristine sputtered RuO2 (similar to 320 F g(-1)) and FLGs (similar to 6 F g(-1)) indicative of the synergistic effect between the FLGs and RuO2. In addition, the fabricated RuO2-FLG supercapacitors show excellent cycling capability with approximately 70% retention of initial specific capacitance over 4000 cycles at high charging-discharging rates of 500 mV s(-1). The superior electrochemical performance is attributed to the good electronic conductivity of the FLGs as well as high utilization of well-dispersed RuO2 nanoparticles on FLGs.