• 文献标题:   Using Single-Crystal Graphene to Form Arrays of Nanocapsules Enabling the Observation of Light Elements in Liquid Cell Transmission Electron Microscopy
  • 文献类型:   Article, Early Access
  • 作  者:   LEE CH, HUANG M, LUO D, JANG JE, PARK C, KANG SJ, RUOFF RS, JIN SH, LEE HW
  • 作者关键词:   liquid cell tem, liquid nanocapsule, singlecrystal graphene, silicon nanoparticle, controlled geometry, high spatial resolution
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1021/acs.nanolett.2c02323 EA AUG 2022
  • 出版年:   2022

▎ 摘  要

We have designed and fabricated a TEM (transmission electron microscopy) liquid cell with hundreds of graphene nanocapsules arranged in a stack of two Si3N4-x membranes. These graphene nanocapsules are formed on arrays of nanoholes patterned on the Si(3)N(4-x )membrane by focused ion beam milling, allowing for better resolution than for the conventional graphene liquid cells, which enables the observation of light elements, such as atomic structures of silicon. We suggest that multiple nanocapsules provide opportunities for consecutive imaging under the same conditions in a single liquid cell. The use of single-crystal graphene windows offers an excellent signaltonoise ratio and high spatial resolution. The motion of silicon nanoparticles (a low atomic number (Z) material) interacting with nanobubbles was observed, and analyzed, in detail. Our approach will help advance liquid-phase TEM observations by providing a straightforward method to encapsulate liquid between monolayers of various 2-dimensional materials.