• 文献标题:   Characteristics of graphene FET directly transformed from a resist pattern through interfacial graphitization of liquid gallium
  • 文献类型:   Article
  • 作  者:   FUJITA JI, UEKI R, NISHIJIMA T, MIYAZAWA Y
  • 作者关键词:   graphene, fet, gallium, solid phase reaction, resist, graphitization, conductance
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Univ Tsukuba
  • 被引频次:   5
  • DOI:   10.1016/j.mee.2011.01.014
  • 出版年:   2011

▎ 摘  要

We found that an extremely thin resist pattern on silicon dioxide can be directly transformed into a graphene field effect transistor (FET) channel via interfacial graphitization of liquid gallium. These patterned graphene FETs have p-type characteristics and a maximum conductance modulation of 22% against an applied gate voltage that ranges from -50 to +50 V at room temperature. Further reduction of the initial resist thickness improves the modulation ratio remarkably up to more than 100%, but at the same time the conductance deteriorates greatly, to less than 10(-9) S. We believe that electron scattering at the grain-domain boundaries strongly increases the resistance of the channel, leading to an apparent on-off ratio increase as if the channel was behaving as a semiconductor. (C) 2011 Elsevier B.V. All rights reserved.