▎ 摘　　要

In this study, we investigated the use of surface activated bonding at room temperature for layer transfer to improve the quality of the transferred material. Surface organic contaminants and the crystal quality of graphene transferred by surface activated bonding were compared with those in the case of thermal compression bonding at 250 degrees C. The physical and chemical surface characteristics of the transferred graphene indicate that the amount of organic contaminants derived from the poly(methyl glutarimide) sacrificial layer was significantly decreased by surface activated bonding at room temperature in comparison with the case of by thermal compression bonding at 250 degrees C. Furthermore, Raman spectra revealed a lower level of disorder in the graphene transferred by the surface activated bonding. Thus, surface activated bonding can provide a platform for a layer transfer process suitable for the integration of two-dimensional materials. (C) 2018 The Japan Society of Applied Physics