• 文献标题:   Deterministic patterned growth of high-mobility large-crystal graphene: a path towards wafer scale integration
  • 文献类型:   Article
  • 作  者:   MISEIKIS V, BIANCO F, DAVID J, GEMMI M, PELLEGRINI V, ROMAGNOLI M, COLETTI C
  • 作者关键词:   graphene, cvd, highmobility, wafer scale integration, seeded growth
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Ist Italiano Tecnol
  • 被引频次:   20
  • DOI:   10.1088/2053-1583/aa5481
  • 出版年:   2017

▎ 摘  要

We demonstrate rapid deterministic (seeded) growth of large single-crystals of graphene by chemical vapour deposition (CVD) utilising pre-patterned copper substrates with chromium nucleation sites. Arrays of graphene single-crystals as large as several hundred microns are grown with a periodicity of up to 1 mm. The graphene is transferred to target substrates using aligned and contamination-free semi-dry transfer. The high quality of the synthesised graphene is confirmed by Raman spectroscopy and transport measurements, demonstrating room-temperature carrier mobility of 21 000 cm(2) V-1 s(-1) when transferred on top of hexagonal boron nitride. By tailoring the nucleation of large single-crystals according to the desired device geometry, it will be possible to produce complex device architectures based on single-crystal graphene, thus paving the way to the adoption of CVD graphene in wafer-scale fabrication.