• 文献标题:   Identifying the mechanisms of p-to-n conversion in unipolar graphene field-effect transistors
  • 文献类型:   Article
  • 作  者:   YAP RCC, LI H, CHOW WL, LU CX, TAY BK, TEO EHT
  • 作者关键词:  
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484
  • 通讯作者地址:   Nanyang Technol Univ
  • 被引频次:   1
  • DOI:   10.1088/0957-4484/24/19/195202
  • 出版年:   2013

▎ 摘  要

The mechanisms of p-to-n conversion and vice versa in unipolar graphene field-effect transistors (GFETs) were systematically studied using Raman spectroscopy. Unipolar p-type GFETs are achieved by decorating the graphene surface with a thin layer of titanium (Ti) film, resulting in a Raman D peak. The D peak is observed to recover by annealing the GFET in nitrogen ambient followed by silicon nitride. (Si3N4)deposition, suggesting that the Ti adatoms are being partially removed. Furthermore, unipolar n-type GFETs are obtained after the passivation on p-type GFETs. The threshold voltage of the n-type GFET is dependent on the thickness of the Si3N4 layer, which increases as the thickness decreases. A comparison between the Si3N4 and SiO2 passivation layers shows that SiO2 passivation does not convert the GFET into n-type graphene, which identifies the significance of ammonia. (NH3) for the formation of the n-type GFETs. This study provides an insight into the mechanism of controlling the conduction behavior of unipolar GFETs.