▎ 摘　　要

Cu-graphene (Cu-G) hybrid nanointerconnects are promising alternative interconnect solutions for the development of future integrated circuit technology. However, the modeling and simulation of their high-frequency electrical performance remains a challenging problem. To enable the design of complicated Cu-G interconnects, we propose a multiphysics modeling and simulation algorithm to cosimulate Maxwell's equations, dispersion relation of graphene, and Boltzmann equation. We also develop an unconditionally stable time marching scheme to remove the dependence of time step on space step for an efficient simulation of the multiscaled and multiphysics system. Extensive numerical experiments and comparisons with measurements have validated the accuracy and efficiency of the proposed work. This article has also been applied to predict the crosstalk effect and propagation delay of graphene-encapsulated Cu nanointerconnects.