▎ 摘　　要

Graphene nanocrystallites embedded in amorphous carbon matrix can bring excellent tribological, electrical and magnetical properties to the carbon films. But too large size of graphene nanocrystallite would lead to degradation of the tribological performance. So it is necessary to clarify the dependence of frictional behavior of the carbon film on graphene nanocrystallite size. In order to control the size, different electron irradiation densities were introduced during film growth in the electron cyclotron resonance plasma sputtering process. Frictional tests on the films were carried out with a Pin-on-Disk tribometer. The evolution of graphene nanocrystallite size along with electron irradiation density was examined by transmission electron microscopy and Raman spectroscopy. The results showed that the graphene nanocrystallite size increased with increasing of the electron irradiation density. The film with a graphene nanocrystallite size of 1.09 nm exhibited a low friction coefficient of 0.03 and a long wear life. When nanocrystallite size increased, the friction coefficient increased and the wear life decreased. Observation on transfer film revealed that the nanocrystallite in transfer film grew larger when initial size was 1.09 nm, and changed smaller when initial size was 1.67 nm. The results suggested that embedded graphene nanocrystallite played an important role in the formation of transfer film, the initial size of graphene nanocrystallite strongly affected the frictional behavior of the film, and the graphene nanocrystallite needed to be controlled under a certain size in order to keep the good tribological performance.