• 文献标题:   Photodetection in Hybrid Single-Layer Graphene/Fully Coherent Germanium Island Nanostructures Selectively Grown on Silicon Nanotip Patterns
  • 文献类型:   Article
  • 作  者:   NIU G, CAPELLINI G, LUPINA G, NIERMANN T, SALVALAGLIO M, MARZEGALLI A, SCHUBERT MA, ZAUMSEIL P, KRAUSE HM, SKIBITZKI O, LEHMANN M, MONTALENTI F, XIE YH, SCHROEDER T
  • 作者关键词:   germanium, selective epitaxy, elastic relaxation, graphene, photodetection
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244
  • 通讯作者地址:   IHP
  • 被引频次:   19
  • DOI:   10.1021/acsami.5b10336
  • 出版年:   2016

▎ 摘  要

Dislocation networks are one of the most principle sources deteriorating the performances of devices based on lattice-mismatched heteroepitaxial systems. We demonstrate here a technique enabling fully coherent germanium (Ge) islands selectively grown on nanotippatterned Si(001) substrates. The silicon (Si)-tip-patterned substrate, fabricated by complementary metal oxide semiconductor compatible nanotechnology, features similar to 50-nm-wide Si areas emerging from a SiO2 matrix and arranged in an ordered lattice. Molecular beam epitaxy growths result in Ge nanoislands with high selectivity and having homogeneous shape and size. The similar to 850 degrees C growth temperature required for ensuring selective growth has been shown to lead to the formation of Ge islands of high crystalline quality without extensive Si intermixing (with 91 atom % Ge). Nanotip-patterned wafers result in geometric, kinetic-diffusion-barrier intermixing hindrance, confining the major intermixing to the pedestal region of Ge islands, where kinetic diffusion barriers are, however, high. Theoretical calculations suggest that the thin Si/Ge layer at the interface plays, nevertheless, a significant role in realizing our fully coherent Ge nanoislands free from extended defects especially dislocations. Single-layer graphene/Ge/Si-tip Schottky junctions were fabricated, and thanks to the absence of extended defects in Ge islands, they demonstrate high-performance photodetection characteristics with responsivity of similar to 45 mA W-1 and an I-on/I-off ratio of similar to 10(3).