• 专利标题:   Pressure sensor preparation method, involves arranging oxidation graphene film on electric conduction layer for manufacturing pressure sensor by using laser reduction oxidation graphene fork.
  • 专利号:   CN104949779-A, CN104949779-B
  • 发明人:   PAN N, WANG X, ZHU Y
  • 专利权人:   UNIV CHINA SCI TECHNOLOGY, UNIV CHINA SCI TECHNOLOGY
  • 国际专利分类:   G01L001/20
  • 专利详细信息:   CN104949779-A 30 Sep 2015 G01L-001/20 201581 Pages: 11 Chinese
  • 申请详细信息:   CN104949779-A CN10434560 21 Jul 2015
  • 优先权号:   CN10434560

▎ 摘  要

NOVELTY - The method involves providing oxidation graphene solution on a substrate to obtain an oxidation graphene film. An electrode layer is arranged on a laser reduction oxidation graphene conducting layer for carrying out a photo-etching by using the oxidation graphene film. The electrode layer and the laser reduction oxidation graphene conducting layer are cut by using a laser reduction oxidation graphene fork. The oxidation graphene film is arranged on an electric conduction layer for manufacturing a pressure sensor by using the laser reduction oxidation graphene fork. USE - Pressure sensor preparation method. ADVANTAGE - The method enables realizing high sensitivity and detecting pressure by using the pressure sensor in an effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a pressure sensor.