▎ 摘　　要

NOVELTY - The film has a single-layer graphene film which is sandwiched between two adjacent inert metal layers. USE - Low-stress composite film for micro-mechanical beam. ADVANTAGE - The low-stress composite film with simple production process, low cost and good repeatability is realized. The mechanical strength of the micro-mechanical beam is enhanced. The reliability of the low-stress composite film is enhanced. The carrying capacity of the composite film is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of reducing the stress of the film of the micro-mechanical beam. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram illustrating a preparation process of a low-stress composite film. Silicon wafer (1) Silica oxide layer (2) Titanium metal layer (3) First gold layer (4) Graphene layer (5)