• 专利标题:   Graphene-metal bonding structure for semiconductor device has intermediate material layer which forms edge-contact with metal layer from boundary portions of material contained in intermediate material layer that contacts metal layer.
  • 专利号:   US2015364589-A1, KR2015144176-A, CN105280594-A, US10090386-B2, CN105280594-B
  • 发明人:   LEE J, SHIN H, LEE M, LEE C, LEE J H, SHIN H J, LEE M H, LEE C S, LI M
  • 专利权人:   LEE J, SHIN H, LEE M, LEE C, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/02, H01L029/06, H01L029/16, H01L029/775, H01L021/336, H01L029/78, H01L021/60, H01L023/482, H01L029/15, H01L031/0256, H01L029/45, H01L029/778, H01L029/10, H01L029/165, H01L021/285, H01L023/485, H01L029/417
  • 专利详细信息:   US2015364589-A1 17 Dec 2015 H01L-029/775 201602 Pages: 32 English
  • 申请详细信息:   US2015364589-A1 US533802 05 Nov 2014
  • 优先权号:   KR072972

▎ 摘  要

NOVELTY - The graphene-metal bonding structure has graphene layer (710,730'), and a metal layer which is set on the graphene layer. An intermediate material layer is set between the graphene layer and metal layer, and forms an edge-contact with the metal layer from boundary portions of material contained in the intermediate material layer that contacts the metal layer. The intermediate material layer includes carbon-based material or porous material with pores, crystalline material with crystal grains, and patterned graphene. USE - Graphene-metal bonding structure for semiconductor device (claimed). ADVANTAGE - Reduces the contact resistance between the intermediate material layer and metal layer, and the contact resistance caused by the Schottky barrier since a metal has work function similar to the electron affinity of the semiconductor. Improves the characteristics of the semiconductor device by applying the graphene-metal bonding structure to the semiconductor device. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a manufacturing method for graphene-metal bonding structure; and (2) a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the fabricating method for graphene-metal bonding structure. Substrate (701) Graphene layer (710,730')