▎ 摘　　要

NOVELTY - The modulator has two mode conversion coupling structures (11), two micro-ring waveguide structures (5), a phase modulation structure (1), modulation structure (9), dual signal modulation structures (2), modulation coupling structure (3), modulation coupling structure (10) and a MZ adjustable beam splitter (4). The modulator realizes two modes of modulation, TE and TM, and the device is divided into a TE mode modulation area and a TM mode modulation area. The waveguide material of the modulator is silicon, and the material of the substrate is silicon dioxide. USE - Graphene micro-ring-based highly linear polarization-independent electro-optic modulator fixed on substrate. ADVANTAGE - The modulation coupling structure and the micro-ring waveguide structure keep a certain gap to form the coupling a phase modulation structure, modulation and coupling beam splitter package graphene layer, by changing the chemical potential of the graphene layer to modulate the modulation process of the MZ modulator, so as to reach the required high linearity requirement, and the modulator polarization independent and working wavelength tunable, and has important application value for linearized integrated optoelectronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective views of the graphene micro-ring-based highly linear polarization-independent electro-optic modulator. 1Phase modulation structure 2Signal modulation structure 3,10Modulation coupling structures 4MZ adjustable beam splitter 5Micro-ring waveguide structure 6MZ modulator 7Substrate 8Direct current bias 9Modulation structure 11Mode conversion coupling structure 12Tapered mode converter 13Asymmetric directional coupler 14Isolation layer 15Graphene 16Electrode