• 专利标题:   Method for doping synthesized graphene by high temperature heat treatment in gas atmosphere containing dopant,.
  • 专利号:   US2018254183-A1, KR2018100828-A, KR1956189-B1
  • 发明人:   HAM M H, SON M W, MYUNGWOO S
  • 专利权人:   GWANGJU INST SCI TECHNOLOGY, GWANGJU INST SCI TECHNOLOGY
  • 国际专利分类:   C23C016/26, H01L021/02, H01L029/16, H01L029/167, H01L029/66, H01L029/786, C01B032/182
  • 专利详细信息:   US2018254183-A1 06 Sep 2018 H01L-021/02 201862 Pages: 10 English
  • 申请详细信息:   US2018254183-A1 US911991 05 Mar 2018
  • 优先权号:   KR027117

▎ 摘  要

NOVELTY - The method involves loading a catalytic metal into a chemical vapor deposition system, increasing an internal temperature of the chemical vapor deposition system to conduct a heat treatment of the catalytic metal, and injecting a nitrogen compound into the chemical vapor deposition system. The injection of a nitrogen compound is made by generating the nitrogen compound using a bubbler, and injecting the nitrogen compound using an inert gas as a carrier gas. The first amount of first nitrogen compound and the amount of second nitrogen compound is controlled by a first amount of a first carrier gas injected and a second amount of a second carrier gas injected, respectively. The first amount of the first carrier gas injected is from 20-100% by volume of an amount of hydrogen gas injected. USE - Method for doping synthesized graphene by high temperature heat treatment in gas atmosphere containing dopant. ADVANTAGE - Enables to prepare high surface coverage and high quality graphene having a large area. Achieves an effect of synthesizing graphene having an improved surface coverage and a uniform single layer as well as preparing high quality graphene in a large area. DETAILED DESCRIPTION - The nitrogen-containing aromatic compound is one or more kinds selected from the group consisting of pyridine, pentachloropyridine, melamine, acrylonitrile, hexaphenylborazine, poly(4-vinylpyridine), 1,3,5-triazine, and piperidine. DESCRIPTION OF DRAWING(S) - The drawing shows the method for doping synthesized graphene by a high temperature heat treatment in a gas atmosphere containing a dopant.