▎ 摘 要
NOVELTY - The utility model claims a graphene film transfer apparatus for the graphene film transferred to the target substrate. graphene film transfer apparatus comprising a shell, etching and cleaning assembly and peristaltic component. the shell comprises a first inlet and a first outlet, the shell is formed in the vacuum cavity. etching and cleaning component is set in the vacuum cavity, which comprises a chamber and a limiting frame. the chamber comprises a second inlet and a second outlet, respectively connected to a first inlet and a first outlet. liquid limiting frame suspended in the cavity, the limiting frame to form a confinement, graphene film set in the confinement, bottom of the target substrate is set in the chamber. a peristaltic assembly for controlling the flow speed of the liquid in and out. wherein, along with the level shift, and the graphene film transferred to the target substrate.