• 专利标题:   Graphene film transfer apparatus for transferring graphene film to target substrate, has peristaltic component for controlling flow rate of liquid in chamber, where graphene film is transferred to target substrate along with level shift.
  • 专利号:   CN209442655-U
  • 发明人:   LIU Z, PENG H, LIU X, ZHANG J, SUN L, JIA K
  • 专利权人:   BEIJING GRAPHENE INST, UNIV PEKING
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN209442655-U 27 Sep 2019 C01B-032/194 201982 Pages: 8 Chinese
  • 申请详细信息:   CN209442655-U CN20038866 09 Jan 2019
  • 优先权号:   CN20038866

▎ 摘  要

NOVELTY - The utility model claims a graphene film transfer apparatus for the graphene film transferred to the target substrate. graphene film transfer apparatus comprising a shell, etching and cleaning assembly and peristaltic component. the shell comprises a first inlet and a first outlet, the shell is formed in the vacuum cavity. etching and cleaning component is set in the vacuum cavity, which comprises a chamber and a limiting frame. the chamber comprises a second inlet and a second outlet, respectively connected to a first inlet and a first outlet. liquid limiting frame suspended in the cavity, the limiting frame to form a confinement, graphene film set in the confinement, bottom of the target substrate is set in the chamber. a peristaltic assembly for controlling the flow speed of the liquid in and out. wherein, along with the level shift, and the graphene film transferred to the target substrate.