• 专利标题:   Semiconductor device comprises gate structure above channel element comprising channel layer containing silicon, germanium or semiconductor elements, and channel layer containing two-dimensional material.
  • 专利号:   CN113054027-A, US2021305372-A1, DE102020120863-A1, KR2021122645-A, TW202141572-A, US11476333-B2, US2022359660-A1, KR2491906-B1
  • 发明人:   KHADERBAD M A, MA H, LIN G, SHEN Z, SATHAIYA D M, LIN K, SHEN T, KARDERBARTMURUNALAPJIT, SATAYYADANYAKUMAHAVIER, SENSORMIN, DHANYKUMAR S M
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   H01L021/336, H01L021/34, H01L021/8238, H01L027/092, H01L029/06, H01L029/10, H01L029/26, H01L029/78, H01L029/66, H01L029/12, H01L029/16, H01L029/24, H01L029/423, H01L029/786, H01L021/02, H01L021/76
  • 专利详细信息:   CN113054027-A 29 Jun 2021 H01L-029/78 202163 Pages: 40 Chinese
  • 申请详细信息:   CN113054027-A CN10172261 08 Feb 2021
  • 优先权号:   US002505P, US937277, US814276

▎ 摘  要

NOVELTY - A semiconductor device comprises a channel element and a gate structure above the channel element. The channel element comprises a channel layer (A) and a channel layer (B) above the layer (A). The layer (A) comprises silicon, germanium, group III-V semiconductor or group II-VI semiconductor. The layer (B) contains a two-dimensional material. USE - Semiconductor device. ADVANTAGE - The device has excellent performance and is manufactured by an economical method. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for formation of the semiconductor device, which involves providing a workpiece comprising a semiconductor structure, depositing a two-dimensional material layer above the semiconductor structure, and forming the gate structure above the two-dimensional material layer. The semiconductor structure comprises silicon, germanium, group III-V semiconductor or group II-VI semiconductor. The two-dimensional material comprises graphene, tungsten sulfide, tungsten telluride, tungsten selenide, molybdenum sulfide, molybdenum telluride, black phosphorus or molybdenum selenide.