▎ 摘　　要

NOVELTY - The sensor has a polyimide flexible dielectric layer, a metal array layer, a graphene layer and a carbon nitride layer sequentially arranged on a silicon dioxide substrate layer. The metal array layer is provided with multiple metal periodic structure units that are used for resonance with terahertz wave. Each metal periodic structure unit on the metal array layer is provided with a D-shaped resonance ring and a C-shaped resonance ring, where thickness of the flexible polyimide layer is 2 microns. USE - Hetero-junction terahertz metamaterial sensor for protein detection. ADVANTAGE - The sensor can change a surface medium environment of the metal array layer by arranging metal periodic structural units that resonate with terahertz waves on the metal array layer, so that resonance frequency and transmission amplitude involved in the terahertz wave band are changed, thus achieving realization of ultra-sensitive and multi-dimensional detection of proteins in an effetive manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method for a heterojunction Terahertz metamaterial sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a hetero-junction terahertz metamaterial sensor for protein detection. 1Carbon nitride layer 2Graphene layer 3Metal array layer 4Polyimide flexible dielectric layer 5Silicon dioxide substrate layer