• 专利标题:   Graphene micro bolometer, has silicon substrate provided with semiconductor silicon chip, where silicon substrate is formed with air holes, and suspension support layer formed with rectangular blind hole.
  • 专利号:   CN205607540-U
  • 发明人:   YANG J, TANG L, FENG S, WEI X, SHI H, DU C
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   G01J005/20, H01L031/09
  • 专利详细信息:   CN205607540-U 28 Sep 2016 G01J-005/20 201669 Pages: 7 Chinese
  • 申请详细信息:   CN205607540-U CN21087866 23 Dec 2015
  • 优先权号:   CN21087866

▎ 摘  要

NOVELTY - The utility model claims a graphene-based bolometer, the graphene micro-bolometer comprises a silicon substrate (101), a suspension hole (102), supporting layer (103), metal electrode lead (104), graphene is an infrared sensitive layer (105), graphene protection layer (106), supporting layer, micro-pores (107). the micro-detect radiation heat meter uses graphene as broad-band infrared absorbing sensitive layer and uses the supported layer microporous structure improves the infrared detecting sensitivity, simple structure and low cost, and has excellent refrigeration broad band infrared detection performance.