• 专利标题:   Silicon based waveguide visible light wave band graphene integrated photovoltaic detector, has silicon substrate arranged with dielectric layer, where two sides of silicon nitride waveguide layer are contact with continuous graphene layer.
  • 专利号:   CN107316915-A, CN107316915-B
  • 发明人:   CHEN Y, ZHANG T, WU Z, ZHANG Y, YU S
  • 专利权人:   UNIV SUN YATSEN, UNIV SUN YATSEN
  • 国际专利分类:   H01L031/0232, H01L031/032, H01L031/113, H01L031/18
  • 专利详细信息:   CN107316915-A 03 Nov 2017 H01L-031/113 201778 Pages: 11 Chinese
  • 申请详细信息:   CN107316915-A CN10537913 04 Jul 2017
  • 优先权号:   CN10537913

▎ 摘  要

NOVELTY - The detector has a crystal silicon substrate arranged with a silicon dioxide dielectric layer and a silicon nitride waveguide layer. A surface of a silicon dioxide medium layer is formed with a silicon nitride waveguide layer. A continuous molybdenum disulfide layer is paved on an upper part of the silicon nitride waveguide layer. Two sides of the silicon nitride waveguide layer are contact with a continuous graphene layer, where thickness of the continuous graphene layer is 0.5nm to 2nm. A metal electrode is made of a titanium and gold material. USE - Silicon based waveguide visible light wave band graphene integrated photovoltaic detector. ADVANTAGE - The detector realizes response reach to high 32A/W degrees. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a silicon based waveguide visible light wave band graphene integrated photovoltaic detector.