▎ 摘 要
NOVELTY - The method involves forming a crystalline catalytic metal layer composed of copper or nickel on a plane or a plane of a magnesium aluminate single-crystal substrate or a magnesium oxide single-crystal substrate. A cap layer (305) composed of an oxide is formed on the formed catalytic metal layer (322). A plane of the crystalline catalytic metal layer is exposed as a side wall by etching a stack including the substrate (301), the catalytic metal layer and the cap layer. The graphene is selectively grown on the exposed side wall by chemical vapor deposition. USE - Method for producing a graphene nanoribbon. ADVANTAGE - The crystalline catalytic metal layer composed of copper or nickel is formed on a plane or a plane of a magnesium aluminate single-crystal substrate or a magnesium oxide single-crystal substrate, and the graphene is selectively grown on the exposed side wall by chemical vapor deposition, thus enables graphene nanoribbon having a controlled width and having an edge portion with a controlled structure to be formed at a desired position on a substrate. A graphene nanoribbon having a controlled width and having an edge portion with a controlled structure is formed based on a metal layer deposition technique that allows more accurate and finer-scale thickness control. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of a process for graphene nanoribbon fabrication. Substrate (301) Crystalline spacer layer (303) Cap layer (305) Graphene nanoribbons (310) Catalytic metal layer (322)