• 专利标题:   Method for producing graphene nanoribbon, involves forming crystalline catalytic metal layer on plane of a magnesium aluminate single-crystal substrate or magnesium oxide single-crystal substrate, and growing graphene on exposed side wall.
  • 专利号:   US2014080291-A1, JP2014055087-A
  • 发明人:   NOZAWA K, ODAGAWA A
  • 专利权人:   PANASONIC CORP, PANASONIC CORP
  • 国际专利分类:   H01L021/02, C01B031/02, H01L021/28, H01L021/336, H01L029/06, H01L029/41, H01L029/417, H01L029/786, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   US2014080291-A1 20 Mar 2014 H01L-021/02 201423 Pages: 38 English
  • 申请详细信息:   US2014080291-A1 US025718 12 Sep 2013
  • 优先权号:   JP201158

▎ 摘  要

NOVELTY - The method involves forming a crystalline catalytic metal layer composed of copper or nickel on a plane or a plane of a magnesium aluminate single-crystal substrate or a magnesium oxide single-crystal substrate. A cap layer (305) composed of an oxide is formed on the formed catalytic metal layer (322). A plane of the crystalline catalytic metal layer is exposed as a side wall by etching a stack including the substrate (301), the catalytic metal layer and the cap layer. The graphene is selectively grown on the exposed side wall by chemical vapor deposition. USE - Method for producing a graphene nanoribbon. ADVANTAGE - The crystalline catalytic metal layer composed of copper or nickel is formed on a plane or a plane of a magnesium aluminate single-crystal substrate or a magnesium oxide single-crystal substrate, and the graphene is selectively grown on the exposed side wall by chemical vapor deposition, thus enables graphene nanoribbon having a controlled width and having an edge portion with a controlled structure to be formed at a desired position on a substrate. A graphene nanoribbon having a controlled width and having an edge portion with a controlled structure is formed based on a metal layer deposition technique that allows more accurate and finer-scale thickness control. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of a process for graphene nanoribbon fabrication. Substrate (301) Crystalline spacer layer (303) Cap layer (305) Graphene nanoribbons (310) Catalytic metal layer (322)