▎ 摘　　要

NOVELTY - Controlling carbon in graphene nano-sized crystalline film electron cyclotron resonance involves P type silicon as a substrate which is mixed in solvent and then ultrasonically cleaned in acetone and ethanol solutions. The substrate is naturally dried in a vacuum machinery pump and then placed in a microwave magnetic field, where electric current is supplied for 10-30 minutes. The substrate is coated on front in presence of argon gas, where substrate surface is cleaned and then connected with target sputtering voltage. USE - Method for controlling carbon in graphene nano-sized crystalline film (claimed). DETAILED DESCRIPTION - Controlling carbon in graphene nano-sized crystalline film electron cyclotron resonance involves P type silicon as a substrate which is mixed in solvent and then ultrasonically cleaned in acetone and ethanol solutions. The substrate is naturally dried in a vacuum machinery pump and then placed in a microwave magnetic field, where electric current is supplied for 10-30 minutes. The substrate is coated on front in presence of argon gas, where substrate surface is cleaned and then connected with target sputtering voltage. Carbon atom is deposited on the target silicon substrate surface to obtain carbon deposited film, and then connected the substrate to power supply of microwave power of 160-400 Watt with electric current of 30-120 miliAmpere per cm2.