• 专利标题:   Method for manufacturing semiconductor structure, involves carrying out hydrogenation treatment process by graphene structure to generate energy bandgap on graphene structure, and forming grid dielectric layer on graphene structure.
  • 专利号:   CN107968121-A
  • 发明人:   ZHANG H, CHEN Z
  • 专利权人:   SEMICONDUCTOR MFG INT SHANGHAI CORP, SEMICONDUCTOR MFG INT BEIJING CORP
  • 国际专利分类:   H01L029/78, H01L029/16, H01L021/336
  • 专利详细信息:   CN107968121-A 27 Apr 2018 H01L-029/78 201831 Pages: 12 Chinese
  • 申请详细信息:   CN107968121-A CN10915984 20 Oct 2016
  • 优先权号:   CN10915984

▎ 摘  要

NOVELTY - The method involves providing a fin-type structure to form an initial graphene layer. A patterned metal layer is formed on an initial graphene layer. The patterned metal layer is formed in a groove under the initial graphene layer. The initial graphene layer is converted into a dual-layer graphene structure. A hydrogenation treatment process is carried out by the dual-layer graphene structure to generate an energy bandgap on the dual-layer graphene structure. A grid dielectric layer is formed on the dual-layer graphene structure. A graphene film layer is placed on a copper layer. USE - Method for manufacturing a semiconductor structure. ADVANTAGE - The method enables forming a dual-layer graphene band gap on a semiconductor structure so as to increase electron mobility of the semiconductor structure, thus improving cut-off voltage stability and production quality in an effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor structure. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing a semiconductor structure. `(Drawing includes non-English language text)`